Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

杨加志; 赵成刚; 刘晓丽; 于俊伟; 孙东平; 唐卫华

doi:10.1016/S1004-9541(11)60151-1

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Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering

Updated：2026-01-06

- Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering
- Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering
- 中国化学工程学报（英文版） 2011年19卷第2期页码：179-184
- Affiliations：
  
  1. School of Chemistry and Chemical Engineering, Nanjing University of Science and Technology,Nanjing,China,210094
  2. School of Mechanical Engineering, Anyang Institute of Technology,Anyang,China,455000
- Author bio：
- Funds：
  
  Supported by the National Natural Science Foundation of China (10776014);Nanjing University of Science and Technology (NUST) Research Funding
- DOI：10.1016/S1004-9541(11)60151-1
  中图分类号：
- 纸质出版：2011
- Accepted：
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杨加志, 赵成刚, 刘晓丽, 等. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. 中国化学工程学报（英文版）, 2011,19(2):179-184.

YANG Jiazhi, ZHAO Chenggang, LIU Xiaoli, YU Junwei, SUN Dongping, TANG Weihua. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. , 2011, 19(2): 179-184.
杨加志, 赵成刚, 刘晓丽, 等. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. 中国化学工程学报（英文版）, 2011,19(2):179-184. DOI： 10.1016/S1004-9541(11)60151-1.

YANG Jiazhi, ZHAO Chenggang, LIU Xiaoli, YU Junwei, SUN Dongping, TANG Weihua. Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering[J]. , 2011, 19(2): 179-184. DOI： 10.1016/S1004-9541(11)60151-1.

摘要

Abstract

Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1

were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure

surface morphology and optoelectrical characteristics with X-ray diffraction (XRD)

scanning electron microscopy (SEM)

atomic force microscopy (AFM)

and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O

/Ar

volume ratio) in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square

-1

(Ω·sq

-1

)

]

and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min

-1

(sccm) during the deposition.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices.

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