Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon

李建隆; 陈光辉; 张攀; 王伟文; 段继海

doi:10.1016/S1004-9541(11)60052-9

Your Location：

Home >

Browse articles >

Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon

Updated：2026-01-06

- Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon
- Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon
- 中国化学工程学报（英文版） 2011年19卷第5期页码：747-753
- Affiliations：
  
  1. Institute of Chemical Engineering, Qingdao University of Science and Technology,Qingdao,China,266042
  2. Institute of Electromechanical Engineering, Qingdao University of Science and Technology,Qingdao,China,266061
- Author bio：
- Funds：
  
  Supported by the Natural Science Foundation of Shandong Province of China (ZR2009BM011);the Doctor Foundation of Shandong Province of China (BS2010NJ005)
- DOI：10.1016/S1004-9541(11)60052-9
  中图分类号：
- 纸质出版：2011
- Accepted：
Scan QR Code
李建隆, 陈光辉, 张攀, 等. Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon[J]. 中国化学工程学报（英文版）, 2011,19(5):747-753.

LI Jianlong, CHEN Guanghui, ZHANG Pan, WANG Weiwen, DUAN Jihai. Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon[J]. , 2011, 19(5): 747-753.
李建隆, 陈光辉, 张攀, 等. Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon[J]. 中国化学工程学报（英文版）, 2011,19(5):747-753. DOI： 10.1016/S1004-9541(11)60052-9.

LI Jianlong, CHEN Guanghui, ZHANG Pan, WANG Weiwen, DUAN Jihai. Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon[J]. , 2011, 19(5): 747-753. DOI： 10.1016/S1004-9541(11)60052-9.

摘要

Abstract

Various methods for production of polysilicon have been proposed for lowering the production cost and energy consumption

and enhancing productivity

which are critical for industrial applications. The fluidized bed chemical vapor deposition (FBCVD) method is a most promising alternative to conventional ones

but the homo-geneous reaction of silane in FBCVD results in unwanted formation of fines

which will affect the product quality and output. There are some other problems

such as heating degeneration due to undesired polysilicon deposition on the walls of the reactor and the heater. This article mainly reviews the technological development on FBCVD of polycrystalline silicon and the research status for solving the above problems. It also identifies a number of chal-lenges to tackle and principles should be followed in the design of a FBCVD reactor.

关键词

Keywords

references

浏览量

3505

Downloads

CSCD

文章被引用时，请邮件提醒。

Submit

工具集

关联资源

Effects of noise on fluidized bed characteristics measurements by electrical capacitance tomography

Lower size limit of raw coal for efficient beneficiation in air-fluidized bed with magnetite particles

Hydrodynamic analysis of carbon nanotube clusters in distributor-less conical fluidized beds with step-by-step scaling

Fluidization thermal decomposition of sodium fluosilicate

Scale-up and thermal stability analysis of fluidized bed reactors for ethylene polymerization