Kinetic and Microstructure of SiC Deposited from SiCl4-CH4-H2

杨艳; 张伟刚

doi:10.1016/S1004-9541(08)60226-8

Your Location：

Home >

Browse articles >

Kinetic and Microstructure of SiC Deposited from SiCl₄-CH₄-H₂

Updated：2026-01-06

- Kinetic and Microstructure of SiC Deposited from SiCl₄-CH₄-H₂
- Chinese Journal of Chemical Engineering Vol. 17, Issue 3, Pages: 419-426(2009)
- Affiliations：
  
  1. State Key Lab of Multi-phase Complex Systems, Ins1. State Key Lab of Multi-phase Complex Systems, Institute of Process Engineering, CAS,Beijing,China,100190
  2. Graduate University of Chinese Academy of Sciences,Beijing,China,100049
- Author bio：
- Funds：
- DOI：10.1016/S1004-9541(08)60226-8
  CLC：
- Published：2009
- Accepted：
Scan QR Code
-CH
DOI：

-CH DOI： 10.1016/S1004-9541(08)60226-8.

摘要

Abstract

Silicon carbide was prepared from SiCl

-CH

-H

gaseous precursors by isothermal

isobaric chemical vapor deposition (CVD) at atmospheric pressure and temperatures ranging from 900℃ to 1100℃. Kinetic studies showed that carbosilane of SiH

SiHCl

and SiCl

formed from decomposition of SiCl

and CH

contributed to the deposition of hexangular facet and granular pebble structured SiC. An average apparent activation energy of 152 kJ·mol

-1

was determined. The overall CVD process was controlled not only by the surface reactions but also by complex gas phase reactions. The as-deposited thin film was characterized using scanning electron microscopy

X-ray diffraction and transmission electron microscopy

these analysis showed that the deposited thin film consisted of pure phase of the β-SiC

the growth morphology of β-SiC differs from hexangular facet to granular pebble structures

which varied with substrate length and CVD temperature.

关键词

Keywords

references

Views

266

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Mechanism insights into radical driven antibiotic degradation and green H2O2 production of Al2O3/g-C3N5 piezocatalyst

Bastnaesite carbochlorination process with fluorine fixation agents:An approach for low-waste rare earth extraction

Citric acid-modified silicon anode with dual carbon stress modulation for stable lithium storage

Synthesis of liquid caged hydrocarbon fuel by intramolecular [2+2] photocycloaddition for advanced propulsion

Investigation of reaction pathways and kinetics in the gas-phase noncatalytic oxidation of hexafluoropropylene

Related Author

Yang Lili

Zhao Wenxuan

Xu Hongwei

Xu Mingyang

Guo Chenxi

Zhu Zhaoyou

Wang Yinglong

Meng Fanqing

Related Institution

College of Chemical Engineering, Qingdao University of Science and Technology

School of Metallurgy, Northeastern University

School of Environmental and Chemical Engineering, Jiangsu University of Science and Technology

School of the Environment and Safety Engineering, Jiangsu University

Key Laboratory for Green Chemical Technology of the Ministry of Education, School of Chemical Engineering and Technology, National Industry-Education Platform for Energy Storage, Tianjin University

⁰