NF

3

is commonly used as an etching and cleaning gas in semiconductor industry

however it is a strongly greenhouse gas. Therefore

the destruction of disposal NF

3

is an urgent task to migrate the greenhouse effect. Among the technologies for NF

3

abatement

the destructive sorption of NF

3

over metal oxides sor bents is an effective way. Thus

the search for a highly reactive and utilized sorbent for NF

3

destruction is in great demand. In this work

AlOOH supported on carbon-sphere (AlOOH/CS) as precursors were syn thesized hydrothermally and heat-treated to prepare the Al

2

O

3

sorbents. The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al

2

O

3

sorbents for NF

3

destruction was investi gated

and it is shown that the Al

2

O

3

from AlOOH/CS hydro-thermalized at 120℃ is superior to others. Subsequently

the optimized Al

2

O

3

was covered by Mn(OH)

x

to prepare Mn/Al

2

O

3

sorbents

via

changing hydrothermal temperatures and Mn loadings. The results show that the Mn/Al

2

O

3

sorbents are more uti lized than bare Al

2

O

3

in NF

3

destructive sorption due to the promotional effect of Mn

2

O

3

as surface layer on the fluorination of Al

2

O

3

as substrate

especially the optimal 5%Mn/Al

2

O

3

(160 ℃) exhibits a utilization percentage as high as 90.4%

and remarkably exceeds all the sorbents reported so far. These findings are beneficial to develop more efficient sorbents for the destruction of NF

3

.